Novel circular chirp standards for characterising the instrument transfer function and topography fidelity of areal surface measurement tools. Download here… Read More

Date: 25–26 April 2018 Venue: PTB, Berlin, Germany… Read More

Hosted by semi European 3D Summit Date: 24 January 2018 Venue: art’otel Dresden, Germany Agenda: Carlos Betia (CEA Leti): ‘Project objectives – Industrials and R&D institutions expectations’ Djamel Allal (LNE): ‘Metrological issues and challenges for 3D-SIC manufacturing’ Ingrid De Wolf (imec): ‘Assessment of GHz Scanning Acoustic Microscopy (GHz-SAM) for detection of 3D-SIC processing defects’ Gaoliang… Read More

Date: 25 September 2017 Venue: CEA Leti Agenda: Elena Dilonardo (CNR-Italy): ‘Analysis and Visualization of Materials by X-ray nano-Computed Tomography (nano-CT)’ and ‘Laboratory Information Metrology Management System’ (via Skype entreprise) Carlos Beitia (CEA): ‘Die level topography traceability measurements challenges’ José Moran (LNE): ‘Combined AFM/STM microscopy based on a quartz tuning fork sensor: surface morphology and… Read More

Date: 15 December 2016 Venue: imec, Leuven, Belgium Details and registration on http://bit.ly/3DstackICmetr… Read More

Date: 29 February 2016 Venue: METAS, Bern, Switzerland See Publishable summary for impact and results to date.… Read More

Date: 10 June 2015 Venue: LNE, Paris, France… Read More