May 8, 2018 Hosted by semi European 3D Summit Date: 24 January 2018 Venue: art’otel Dresden, Germany Agenda: Carlos Betia (CEA Leti): ‘Project objectives – Industrials and R&D institutions expectations’ Djamel Allal (LNE): ‘Metrological issues and challenges for 3D-SIC manufacturing’ Ingrid De Wolf (imec): ‘Assessment of GHz Scanning Acoustic Microscopy (GHz-SAM) for detection of 3D-SIC processing defects’ Gaoliang Dai (PTB): ‘State-of-the-art metrology infrastructure at PTB for supporting 3D-SIC’