Hosted by semi European 3D Summit

Date: 24 January 2018

Venue: art’otel Dresden, Germany

Agenda:

• Carlos Betia (CEA Leti): ‘Project objectives – Industrials and R&D institutions expectations’
• Djamel Allal (LNE): ‘Metrological issues and challenges for 3D-SIC manufacturing’
• Ingrid De Wolf (imec): ‘Assessment of GHz Scanning Acoustic Microscopy (GHz-SAM) for detection of 3D-SIC processing defects’
• Gaoliang Dai (PTB): ‘State-of-the-art metrology infrastructure at PTB for supporting 3D-SIC’