Tuomas Hieta of Gasera will be hosting an online workshop on Airborne Chemical Contamination on 17th November 2020. Featuring a range of speakers from across research and industry, talks are planned covering subjects such as:

  • Airborne chemical containment measurement technology
  • Generating, sampling and handling airborne chemical contaminants
  • Measuring HF, NH3 & HCl in cleanrooms

The workshop will focus on understanding the link between airborne chemical contamination and process failure and provide an extensive coverage of state-of-the-art and emerging contaminant measurement technologies. The workshop also covers generation and sampling methodology of key chemical contaminants and the related metrological aspects.

The workshop is intended for technical staff and experts involved in airborne chemical contamination control. The one-day workshop program covers various aspects of airborne chemical contamination and the attendees can freely choose which parts of the program to take part in.


Please use the following link to secure your place: Registration booking form

The full programme is available to view or download.

Airborne contaminants in cleanrooms