The aim of this work package is to enable reliable, high resolution mechanical property mapping using small indentations. This will be achieved in two ways:

  • by improving AFM-based indentation through the generation of new and improved diamond probes
  • by extending the reach of conventional Instrumented indentation testing (IIT) into the regime presently addressed only by AFM based indentation testing.
Fig. 2.1. (left) Adama etch-based batch processing showing production of mounted diamond flat punch on steel holder for iNano IIT system. (right) MEMS-based IIT actuator developed by PTB and TUCh.

Fig. 2.1. (left) Adama etch-based batch processing showing production of mounted diamond flat punch on steel holder for iNano IIT system. (right) MEMS-based IIT actuator developed by PTB and TUCh.