“Advanced 3D chemical metrology for innovative technologies”, 3DMetChemIT, is a research project under the European Metrology Programme for Innovation and Research. Consumer demand for faster, smarter and cheaper products drives innovation in high value-added technologies. To satisfy these demands industry is increasingly using 3D micro and nanoscale architectures, additive manufacturing and new material combinations from a rapidly expanding library of materials. This increases the need for capabilities to measure the chemical composition of complex materials and devices with 3D-spatial resolution. The 3DMetChemIT project addresses major challenges in the analysis of buried interfaces and heterogeneous organic-inorganic materials to develop beyond state-of-the-art capabilities, trusted methods and reference materials for 3D-resolved chemical analysis using secondary ion mass spectrometry, atom probe tomography and grazing-incidence x-ray fluorescence spectroscopy. The objectives of the project are To develop advanced metrology capability for chemical 3D imaging of organic and heterogeneous devices with high spatial and high “chemical resolution”. To develop metrology and standardisation for atomic resolution 3D elemental imaging of inorganics. To develop 3D chemical imaging of irregular devices and complex organic-inorganic interfaces. To advance metrology capability for accurate chemical identification of defects and buried interfaces. To develop calibration standards, 3D nano-structured reference materials and traceable quantification methods for 3D structured devices. To ensure uptake of the metrology and measurement infrastructure by industry to enhanc the competitiveness of EU industry.